Design and Implementation of Mode Localised Resonant MEMS Oscillators for Gravimetric Sensing
type: CreativeWork
description: In a spectrum ranging from a subatomic particle which is approximately 10^(-26) m, to the observable universe, which is of the order of 10^(26) m, airborne ultrafine particles have a diameter of less than 100nm. The adverse impact of these ultrafine airborne particles on human health has been the focus of numerous clinical studies, including respiratory and cardiovascular diseases. Empirical results of the clinical studies suggest that it is essential to map the emission sources of these ultrafine airborne particles to monitor and regulate them. Recognizing the cumbersome nature of the traditional optical methods and their inability to count individual particles below 100nm due to diffraction limit, new approaches are being researched for sensing these ultrafine particles. In recent decades, Richard Feynman’s (1961) vision of building minuscule machines has been translated to a reality using Microelectromechanical Systems (MEMS) Technology. Integration of miniature electrical and mechanical components fabricated using integrated circuit batch processing techniques is achievable utilising MEMS Technology. As a result, MEMS devices have witnessed exponential growth over the last decade in various fields and have had a significant impact on the field of sensors and sensor systems. This thesis investigates the potential of mode localisation in MEMS devices for sensing ultrafine particles as an approach towards future sensor technologies for gravimetric sensing that could eventually be deployed as part of the emerging Internet-of-Things (IoT) paradigm. Furthermore, this thesis aims to examine the influence of “real-world” conditions during the field deployment of mode localised MEMS resonators for sensing ultrafine particles. In that regard, weakly coupled MEMS resonators utilising mode localisation have been proposed as an alternative to resonant frequency MEMS sensors due to their increased sensitivity and first-order common-mode rejection to variations in temperature.…
abstract: In a spectrum ranging from a subatomic particle which is approximately 10^(-26) m, to the observable universe, which is of the order of 10^(26) m, airborne ultrafine particles have a diameter of less than 100nm. The adverse impact of these ultrafine airborne particles on human health has been the focus of numerous clinical studies, including respiratory and cardiovascular diseases. Empirical results of the clinical studies suggest that it is essential to map the emission sources of these ultrafine airborne particles to monitor and regulate them. Recognizing the cumbersome nature of the traditional optical methods and their inability to count individual particles below 100nm due to diffraction limit, new approaches are being researched for sensing these ultrafine particles. In recent decades, Richard Feynman’s (1961) vision of building minuscule machines has been translated to a reality using Microelectromechanical Systems (MEMS) Technology. Integration of miniature electrical and mechanical components fabricated using integrated circuit batch processing techniques is achievable utilising MEMS Technology. As a result, MEMS devices have witnessed exponential growth over the last decade in various fields and have had a significant impact on the field of sensors and sensor systems. This thesis investigates the potential of mode localisation in MEMS devices for sensing ultrafine particles as an approach towards future sensor technologies for gravimetric sensing that could eventually be deployed as part of the emerging Internet-of-Things (IoT) paradigm. Furthermore, this thesis aims to examine the influence of “real-world” conditions during the field deployment of mode localised MEMS resonators for sensing ultrafine particles. In that regard, weakly coupled MEMS resonators utilising mode localisation have been proposed as an alternative to resonant frequency MEMS sensors due to their increased sensitivity and first-order common-mode rejection to variations in temperature.…
author: Chellasivalingam, Malar
language: eng
keywords: Oscillators, Sensors, Mode Localisation, Amplitude Ratio, Gravimetric, Nanoparticles, Resonant Frequency, Coupled MEMS Resonators, Micro-Electro-Mechanical Systems (MEMS), Microsystems Technology, Airborne Ultrafine Particles
license: https://www.rioxx.net/licenses/all-rights-reserved/
date published: 2021-11-23
date modified: 2026-07-22T22:23:54Z
provider: Cambridge University
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: University of Cambridge

PropertyValue
property ID: DOI
value: 10.17863/CAM.83791