{"id":{"repo_id":"cambridge","oai_identifier":"oai:www.repository.cam.ac.uk:1810/245295"},"canonical_url":"https://search.dev.ndltd.org/etd/cambridge/oai:www.repository.cam.ac.uk:1810/245295","repository":{"repo_id":"cambridge","name":"Cambridge University","base_url":"https://api.repository.cam.ac.uk/server/oai/request"},"display":{"title":"Functional Nano-Structures Using Atomic Layer Deposition","abstract":"","abstract_html":null,"abstract_has_math":false,"creators":["Salgård Cunha, Pedro"],"institution":"University of Cambridge","degree_name":"Doctor of Philosophy (PhD)","degree_level":"Doctoral","degree_discipline":null,"degree_department":null,"school":null,"contributors":[],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2014,"date_issued":"2014-05-27","date_published":"2014-05-27","updated_at":"2026-07-22T22:24:07Z","subjects":[],"languages":["en"],"rights":[],"rights_urls":["https://apollo8-f-pro.lib.cam.ac.uk/bitstreams/f81f509e-a9fa-43e7-8ada-be2801a015ab/download"],"identifier_entries":[]},"links":{"outbound_url":"https://doi.org/10.17863/CAM.16718","outbound_label":"DOI","outbound_source":"dc:identifier.doi"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:creator","label":"Author","values":["Salgård Cunha, Pedro"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.issued","label":"Date","values":["2014-05-27"]},{"key":"dc:publisher.institution","label":"Dc Publisher Institution","values":["University of Cambridge"]},{"key":"dc:relation.isreferencedby.uri","label":"Dc Relation Isreferencedby URI","values":["https://www.repository.cam.ac.uk/handle/1810/245295"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]},{"key":"dc:type.qualificationlevel","label":"Dc Type Qualificationlevel","values":["Doctoral"]},{"key":"dc:type.qualificationname","label":"Dc Type Qualificationname","values":["Doctor of Philosophy (PhD)"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["https://apollo8-f-pro.lib.cam.ac.uk/bitstreams/f81f509e-a9fa-43e7-8ada-be2801a015ab/download"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.doi","label":"DOI","values":["10.17863/CAM.16718"]},{"key":"dc:identifier.uri","label":"Identifier URI","values":["https://apollo8-f-pro.lib.cam.ac.uk/bitstreams/ab648d24-5794-4a08-bd50-f33aa2c94681/download"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:format.checksum.md5","label":"Dc Format Checksum Md5","values":["6f6007ede4b3a91352a7475b86d28b2e","835269bda140c10400fe0606a14c3d21"]},{"key":"dc:title","label":"Title","values":["Functional Nano-Structures Using Atomic Layer Deposition"]}]}],"canonical_facts":{"dc:creator":["Salgård Cunha, Pedro"],"dc:date.issued":["2014-05-27"],"dc:format.checksum.md5":["6f6007ede4b3a91352a7475b86d28b2e","835269bda140c10400fe0606a14c3d21"],"dc:identifier.doi":["10.17863/CAM.16718"],"dc:identifier.uri":["https://apollo8-f-pro.lib.cam.ac.uk/bitstreams/ab648d24-5794-4a08-bd50-f33aa2c94681/download"],"dc:language":["en"],"dc:publisher.institution":["University of Cambridge"],"dc:relation.isreferencedby.uri":["https://www.repository.cam.ac.uk/handle/1810/245295"],"dc:rights":["https://apollo8-f-pro.lib.cam.ac.uk/bitstreams/f81f509e-a9fa-43e7-8ada-be2801a015ab/download"],"dc:title":["Functional Nano-Structures Using Atomic Layer Deposition"],"dc:type":["Thesis"],"dc:type.qualificationlevel":["Doctoral"],"dc:type.qualificationname":["Doctor of Philosophy (PhD)"]},"updated_at":"2026-07-22T22:24:07Z"}