Ortho-Planar Mechanisms for Microelectromechanical Systems

A method for representing the design space of ortho-planar mechanisms has been developed. The method is based on the Theorem of Equality of Orientation Set Measures (TEOSM) which allows mechanisms to be represented by points in an abstract space. The method is first developed for single loop planar folded mechanisms with revolute joints, and later extended to mechanisms with prismatic joints and to spherical folded mechanisms. Functions which assign a value to each point in design space can be used to describe classes of mechanisms and evaluate their utility for MEMS design. Additionally, this work introduces the use of spherical mechanisms in MEMS design. Spherical mechanisms have characteristics that may be useful in MEMS, including the capability of spatial positioning of a link and the ability to convert rotation about an axis perpendicular to the substrate to rotation about an axis parallel to the substrate. Spherical kinematics has been used to develop three novel mechanisms, the Micro Helico-Kinematic Platform (MHKP), the Spherical Bistable Mechanism (SBM), and the Three-degree-of-freedom Platform (3DOFP). Mathematical models of these devices have been developed and MEMS prototypes have been designed and fabricated.

Name thesis:degree_name

PhD

Grantor dc:publisher

Brigham Young University - Provo

Author dc:creator

• Lusk, Craig P.

• MEMS
• Ortho-planar
• out-of-plane
• pop-up
• design space
• Mechanical Engineering

Language dc:language

English

Repository record dc:identifier

https://scholarsarchive.byu.edu/etd/615

OAI identifier oai:identifier

oai:scholarsarchive.byu.edu:etd-1614