{"id":{"repo_id":"arkansas","oai_identifier":"oai:scholarworks.uark.edu:etd-1661"},"canonical_url":"https://search.dev.ndltd.org/etd/arkansas/oai:scholarworks.uark.edu:etd-1661","repository":{"repo_id":"arkansas","name":"University of Arkansas","base_url":"https://scholarworks.uark.edu/do/oai/"},"display":{"title":"Computational Design of the Electrical and Mechanical Performance of Steerable MEMS Antennas","abstract":"<p>This thesis describes the origins, improvements, and variations of a broadband microwave antenna that can be beam-steered by a micro-electromechanical system (MEMS). The steerable MEMS antenna of this work was comprised of a planar antenna on top of a Silicon membrane. The membrane is etched to create a gimbal hinge structure and a platform which supported the antenna and gave it one or two degrees of freedom of rotation. The antennas presented were broadband and fed by a coplanar waveguide (CPW) transmission line which traversed the hinge structure. The antenna's orientation in space was designed to be changed through electrostatic actuation of the antenna platform's hinges.</p> <p>The goal of this thesis was to improve on the initial design and performance of the prototypic antenna. The best variation of the prototype antenna could rotate ±4.0° in two degrees of freedom under 800 VDC of actuation voltage and had a bandwidth of 1.55. The mechanical and electrical aspects of the device were studied and analyzed concurrently. Three variations of the MEMS antenna platform were design and modeled; Generations 1 - 3 (G1 - G3). The G1 platform was an optimized version of the prototypic MEMS platform. The G2 platform could rotate in two dimensions but had much thinner hinges and a more robust antenna platform. The G3 platform was a one degree of freedom version of the G2 platform. A new antenna shape was selected and optimized for integration with the three generations of antenna platforms; the planar inverted cone antenna (PICA). The G3 platform had the best overall electrical and mechanical performance. Two additional antennas were simulated on the G3 platform; a cylindrical dielectric resonator antenna (C-DRA) and a teardrop dielectric resonator antenna (Td-DRA). The three best antenna variations on the G3 platform were simulated to have maximum actuation</p> <p>angles ranging from 10 - 13° and have bandwidths of 3.62 (PICA), 1.70 (C-DRA), and 1.78 (Td-DRA).</p>","abstract_html":"&lt;p&gt;This thesis describes the origins, improvements, and variations of a broadband microwave antenna that can be beam-steered by a micro-electromechanical system (MEMS). The steerable MEMS antenna of this work was comprised of a planar antenna on top of a Silicon membrane. The membrane is etched to create a gimbal hinge structure and a platform which supported the antenna and gave it one or two degrees of freedom of rotation. The antennas presented were broadband and fed by a coplanar waveguide (CPW) transmission line which traversed the hinge structure. The antenna&#x27;s orientation in space was designed to be changed through electrostatic actuation of the antenna platform&#x27;s hinges.&lt;/p&gt; &lt;p&gt;The goal of this thesis was to improve on the initial design and performance of the prototypic antenna. The best variation of the prototype antenna could rotate ±4.0° in two degrees of freedom under 800 VDC of actuation voltage and had a bandwidth of 1.55. The mechanical and electrical aspects of the device were studied and analyzed concurrently. Three variations of the MEMS antenna platform were design and modeled; Generations 1 - 3 (G1 - G3). The G1 platform was an optimized version of the prototypic MEMS platform. The G2 platform could rotate in two dimensions but had much thinner hinges and a more robust antenna platform. The G3 platform was a one degree of freedom version of the G2 platform. A new antenna shape was selected and optimized for integration with the three generations of antenna platforms; the planar inverted cone antenna (PICA). The G3 platform had the best overall electrical and mechanical performance. Two additional antennas were simulated on the G3 platform; a cylindrical dielectric resonator antenna (C-DRA) and a teardrop dielectric resonator antenna (Td-DRA). The three best antenna variations on the G3 platform were simulated to have maximum actuation&lt;/p&gt; &lt;p&gt;angles ranging from 10 - 13° and have bandwidths of 3.62 (PICA), 1.70 (C-DRA), and 1.78 (Td-DRA).&lt;/p&gt;","abstract_has_math":false,"creators":["Roddy, Morgan Andrew"],"institution":null,"degree_name":"Master of Science in Microelectronics-Photonics (MS)","degree_level":"Thesis","degree_discipline":null,"degree_department":null,"school":null,"contributors":["Vickers, Kenneth G.","Hutchings, Douglas A."],"advisors":["El-Shenawee, Magda O."],"committee_chairs":[],"committee_members":[],"year":2012,"date_issued":"2012-12-01T08:00:00Z","date_published":"2012-12-01T08:00:00Z","updated_at":"2026-07-24T00:59:58Z","subjects":["Applied sciences","Antennas","Dielectric resonator antenna","Mems","Steerable antenna","Teardrop antenna","Electrical and Electronics","Electro-Mechanical Systems"],"languages":[],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://scholarworks.uark.edu/etd/662","outbound_label":"Repository record","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Vickers, Kenneth G.","Hutchings, Douglas A."]},{"key":"dc:contributor.advisor","label":"Advisor","values":["El-Shenawee, Magda O."]},{"key":"dc:creator","label":"Author","values":["Roddy, Morgan Andrew"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2012"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2017-09-29T07:00:00Z"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science in Microelectronics-Photonics (MS)"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Applied sciences","Antennas","Dielectric resonator antenna","Mems","Steerable antenna","Teardrop antenna","Electrical and Electronics","Electro-Mechanical Systems"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://scholarworks.uark.edu/etd/662"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["<p>This thesis describes the origins, improvements, and variations of a broadband microwave antenna that can be beam-steered by a micro-electromechanical system (MEMS). The steerable MEMS antenna of this work was comprised of a planar antenna on top of a Silicon membrane. The membrane is etched to create a gimbal hinge structure and a platform which supported the antenna and gave it one or two degrees of freedom of rotation. The antennas presented were broadband and fed by a coplanar waveguide (CPW) transmission line which traversed the hinge structure. The antenna's orientation in space was designed to be changed through electrostatic actuation of the antenna platform's hinges.</p> <p>The goal of this thesis was to improve on the initial design and performance of the prototypic antenna. The best variation of the prototype antenna could rotate ±4.0° in two degrees of freedom under 800 VDC of actuation voltage and had a bandwidth of 1.55. The mechanical and electrical aspects of the device were studied and analyzed concurrently. Three variations of the MEMS antenna platform were design and modeled; Generations 1 - 3 (G1 - G3). The G1 platform was an optimized version of the prototypic MEMS platform. The G2 platform could rotate in two dimensions but had much thinner hinges and a more robust antenna platform. The G3 platform was a one degree of freedom version of the G2 platform. A new antenna shape was selected and optimized for integration with the three generations of antenna platforms; the planar inverted cone antenna (PICA). The G3 platform had the best overall electrical and mechanical performance. Two additional antennas were simulated on the G3 platform; a cylindrical dielectric resonator antenna (C-DRA) and a teardrop dielectric resonator antenna (Td-DRA). The three best antenna variations on the G3 platform were simulated to have maximum actuation</p> <p>angles ranging from 10 - 13° and have bandwidths of 3.62 (PICA), 1.70 (C-DRA), and 1.78 (Td-DRA).</p>"]},{"key":"dc:title","label":"Title","values":["Computational Design of the Electrical and Mechanical Performance of Steerable MEMS Antennas"]}]}],"canonical_facts":{"dc:contributor":["Vickers, Kenneth G.","Hutchings, Douglas A."],"dc:contributor.advisor":["El-Shenawee, Magda O."],"dc:creator":["Roddy, Morgan Andrew"],"dc:date":["2012"],"dc:date.available":["2017-09-29T07:00:00Z"],"dc:description.abstract":["<p>This thesis describes the origins, improvements, and variations of a broadband microwave antenna that can be beam-steered by a micro-electromechanical system (MEMS). The steerable MEMS antenna of this work was comprised of a planar antenna on top of a Silicon membrane. The membrane is etched to create a gimbal hinge structure and a platform which supported the antenna and gave it one or two degrees of freedom of rotation. The antennas presented were broadband and fed by a coplanar waveguide (CPW) transmission line which traversed the hinge structure. The antenna's orientation in space was designed to be changed through electrostatic actuation of the antenna platform's hinges.</p> <p>The goal of this thesis was to improve on the initial design and performance of the prototypic antenna. The best variation of the prototype antenna could rotate ±4.0° in two degrees of freedom under 800 VDC of actuation voltage and had a bandwidth of 1.55. The mechanical and electrical aspects of the device were studied and analyzed concurrently. Three variations of the MEMS antenna platform were design and modeled; Generations 1 - 3 (G1 - G3). The G1 platform was an optimized version of the prototypic MEMS platform. The G2 platform could rotate in two dimensions but had much thinner hinges and a more robust antenna platform. The G3 platform was a one degree of freedom version of the G2 platform. A new antenna shape was selected and optimized for integration with the three generations of antenna platforms; the planar inverted cone antenna (PICA). The G3 platform had the best overall electrical and mechanical performance. Two additional antennas were simulated on the G3 platform; a cylindrical dielectric resonator antenna (C-DRA) and a teardrop dielectric resonator antenna (Td-DRA). The three best antenna variations on the G3 platform were simulated to have maximum actuation</p> <p>angles ranging from 10 - 13° and have bandwidths of 3.62 (PICA), 1.70 (C-DRA), and 1.78 (Td-DRA).</p>"],"dc:identifier":["https://scholarworks.uark.edu/etd/662"],"dc:subject":["Applied sciences","Antennas","Dielectric resonator antenna","Mems","Steerable antenna","Teardrop antenna","Electrical and Electronics","Electro-Mechanical Systems"],"dc:title":["Computational Design of the Electrical and Mechanical Performance of Steerable MEMS Antennas"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["Master of Science in Microelectronics-Photonics (MS)"]},"updated_at":"2026-07-24T00:59:58Z"}