Entwicklung von piezoelektrischen Stellantrieben mit CMOS-kompatibler Ansteuerspannung für mikrotechnische Anwendungen
type: CreativeWork
description: Microsystems, consisting of integrated circuits (IC, CMOS), microsensors such as microactuators, can be build up monolithically as well as hybrid. These systems enable a high degree of functionality to be made with at the same time high level of integration density. While microsensors for such systems are far developed and commercially available, microactuators, which are needed for the control of energy or mass flows, are still at the beginning. The operational areas of control drives in microtechnical applications (microactuators) are various and lie within the range of micropumps, microvalves but also microswitches for the control of electric currents or voltages (microrelays) or for the specific refraction of light (micromirror). These applications require large strokes or deflections from the control drive with at the same time high switching frequencies as low CMOS-compatible applied voltages. With the piezoelectric drive principle high switching cycles are possible with low power consumption and small space requirement. To reach a high level of integration density piezoelectric materials with high piezoelectric coefficients, like lead zirconate titanate [Pb {Zr(x)Ti(1-x)} O3, PZT], have to be selected for the active layer. For this layer suitable techniques for the integration into a CMOS process have to be developed. In the context of this thesis a control drive was developed with piezoelectric energy transformation principle in a modified IC process flow on silicon substrates. The control drive was manufactured in a process consisting of procedures of microelectronics, bulk micromechanics and CSD (Chemical Solution deposition) technology. The characterisation of the microactuators took place at capacitive test-structures and at freely movable cantilever structures. Here the control drives appeared to be fully functionally with tip deflections up to 70µm at applied voltages up to 10V. For an exact evaluation of the mechanical and electrical characteristics o…
abstract: Microsystems, consisting of integrated circuits (IC, CMOS), microsensors such as microactuators, can be build up monolithically as well as hybrid. These systems enable a high degree of functionality to be made with at the same time high level of integration density. While microsensors for such systems are far developed and commercially available, microactuators, which are needed for the control of energy or mass flows, are still at the beginning. The operational areas of control drives in microtechnical applications (microactuators) are various and lie within the range of micropumps, microvalves but also microswitches for the control of electric currents or voltages (microrelays) or for the specific refraction of light (micromirror). These applications require large strokes or deflections from the control drive with at the same time high switching frequencies as low CMOS-compatible applied voltages. With the piezoelectric drive principle high switching cycles are possible with low power consumption and small space requirement. To reach a high level of integration density piezoelectric materials with high piezoelectric coefficients, like lead zirconate titanate [Pb {Zr(x)Ti(1-x)} O3, PZT], have to be selected for the active layer. For this layer suitable techniques for the integration into a CMOS process have to be developed. In the context of this thesis a control drive was developed with piezoelectric energy transformation principle in a modified IC process flow on silicon substrates. The control drive was manufactured in a process consisting of procedures of microelectronics, bulk micromechanics and CSD (Chemical Solution deposition) technology. The characterisation of the microactuators took place at capacitive test-structures and at freely movable cantilever structures. Here the control drives appeared to be fully functionally with tip deflections up to 70µm at applied voltages up to 10V. For an exact evaluation of the mechanical and electrical characteristics o…
author: Küppers, Hartmut Paul
language: ger
keywords: info:eu-repo/classification/ddc/620, Ingenieurwissenschaften, PZT, Mikroaktor, Piezoelektrischer Aktor, piezoelektrisch, Stellantrieb, Mikrosystem, Dünnschicht, piezoelectric, control drive, microsystem, thin film, microactuator
date published: 2006
date modified: 2026-07-30T19:43:10Z
provider: RWTH Aachen University
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: Publikationsserver der RWTH Aachen University