Faseroptische Sensoren zur Prozeßüberwachung in der Mikrosystemtechnik
MEMS (Micro Electronic and Mechanical System) technique is often named a key technique in the 21st century because it has the potential to open by innovative technologies a multiplicity of new application fields. However, the break-through is not yet created. That is among other things because of the fact that beside missing standards the assembly of not monolithically structured systems is particularly time and cost-intensive, since it is done manually. For a economical, automated assembly, which replaces the manual work procedures and brings at the same time high-quality products out, the monitoring and the following simultaneous controlling of the handling and assembling processes are indispensable. Here the investigations and developments begin, which are documented in this thesis. The emphasis is thereby in the use of fibre-optic sensors, which are suited due to different advantages and the possibility of combination with other monitoring procedures for this function. In the context of this work new possibilities of fibre-optic sensors and particularly the potentials of a fibre-optic multi-sensor system are examined regarding the application in the MEMS technique. The base forms thereby the conceptional design of a flexibly shapable image-guide as well as the development of a procedure for the calibration of incoherent fibre-optic bundles, necessary for the implementation of this concept. The innovative application possibilities are pointed out by the concrete example of the process control when assembling MEMS.
info:eu-repo/classification/ddc/620, Ingenieurwissenschaften, Mikrosystemtechnik, Prozessüberwachung, Multisensor, Faseroptischer Sensor
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