Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 14 of 14 for “"wet etch"”.
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Removal of metal oxide defects through improved semi-anisotropic wet etching process
… excess metal defects, evaluated recommended wet etch methods to remove nickel oxide, and finally proposes a wet etch process that will rapidly remove defects while continuing to maintain the desired semi-anisotropic etch profile, uncharacteristic of most wet immersion etch processes. Results …
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Mechanism of fluoride-based etch and clean processes
Fluoride-containing solutions are widely used to etch silicon dioxide-based films. A critical issue in integrated circuit (IC) and microelectromechanical systems (MEMS) fabrication is achievement of adequate selectivity during the etching of different film materials when they are present in …
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Vertical gallium nitride power devices on bulk native substrates
… a smooth vertical fin sidewall by combining dry/wet etch. The normally-off power FinFET demonstrates excellent performances without the need of p-GaN layer or material regrowth. With the optimization of edge termination structures, 800 V blocking voltage was achieved. A further reduction of on …
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Liquid crystal adaptive planar optical devices
… accessing the Bragg grating vertically via a wet etch process, the substrates are precision machined using a dicing saw to allow side access. The result is significantly reduced hysteresis, with a maximum tuning range of over 1nm with the application of under 30V(pp). Tunable chirped Bragg …
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Development of indium arsenide quantum dot solar cells for high conversion efficiency
… QD solar cell. Inductively coupled plasma (ICP) etch without Si3N4 sidewall passivation and wet etch using Si3N4 sidewall passivation are implemented to process the solar cells, to study the effects of processing on the device performance. Spectral response measurements show photocurrents above …
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Design and Fabrication of a Nanocantilever for High-Speed Force Microscopy
… through focused ion beam milling; a subsequent wet etch into the underlying Si substrate suspended the structure. Then, using an active feedback system, electromigration was used to form the APC at 77 K and 10E-6 Torr. Progress was also made toward measuring cantilever motion with the APC …
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Transfer printing of nitride based light emitting diodes
… the current spreading metal due to an alkaline wet etch step, needed during processing to yield suspended membranes. This issue was addressed by reversing the order of the major steps needed to fabricate the LEDs, which resulted in signifcantly improved LED performance. The capabilities of the …
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Growth and Characterisation studies of MgO and Mg silicate dielectric layers on Si and InP surfaces
… The effectiveness of different chemical wet etch preparation procedures are compared to that of in-situ atomic hydrogen cleaning based on both the removal of oxide species and the chemical stability of the cleaned surface. The deposition of Si and Mg silicate interfacial control layers …
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Long-wave infrared frequency combs based on quantum cascade lasers
… devices for spectroscopic purposes. A complete wet etch epi-up fabrication process is reported, with preliminary results on the dry-etch technique to incorporate dispersion compensation strucutre and epi-down fabricaiton for high power CW mode QCL device. Formation of comb(-like) regime has been …
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Nanoscale BioFETs for ultrasensitive pH and biomolecular detection
… and is highly resistant to all forms of etching after annealed. This allows for the use of a wet etch of the fluid passivation layer, removing the possibility of damaging the fragile gate dielectric layer by dry etches such as reactive ion etching. Several critical steps were added for …
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Fiber Optic Pressure Sensor Fabrication Using MEMS Technology
… silica diaphragms have been micro-machined using wet chemical etching in order to form extrinsic Fabry-Perot (FP) interferometric cavities. Sol-gel is used as an intermediate-layer for both fiber-ferrule bonding and ferrule-diaphragm bonding at relatively low temperature (250 °C). The pressure …
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Characterization of Argon and Ar/Cl<sub>2</sub> Plasmas Used for the Processing of Niobium Superconducting Radio-Frequency Cavities
… or possible replacement for the current wet etch processes. Empirical relationships between the user-controlled external parameters and the effectiveness of Reactive Ion Etching (RIE) for the removal of surface layers of bulk niobium have been previously established. However, a lack of a …
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DNA ruler : enhancing nanopore sizing resolution by multiple measurements on the same DNA molecule
… with electron-beam lithography, followed by wet etch and reactive-ion-etching (RIE) technique. Finally, contrary to DNA translocation signals observed in smaller nanopores, a bidirectional modulation of ionic current was observed during the translocation of DNA molecules through the nanopore …
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Novel etch studies and passivation techniques on InAs/GaSb superlattice based infrared detectors
… formation of unsatisfied chemical bonds on the etched surfaces and hence enhancing the surface leakage currents. More-over, with the scaling of single pixel dimensions, the performance of focal plane arrays is strongly dependent on surface effects due to the large pixels surface to volume ratio. …