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Showing 1 to 2 of 2 for “"wafer chuck"”.
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Methods for nano-precise overlay in advanced in pick-and-place assembly
… particles, which are often present between the wafer and the wafer chuck. We have developed new compliant chuck designs to address this problem. While the above overlay control methods are developed for J-FIL, they are set up to ultimately be integrated into another technique – N-MAP. This …
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Determination of Ionization Fraction and Plasma Potential in a DC Magnetron Sputtering System Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer
Made available in DSpace on 2017-07-06T18:48:17Z (GMT). No. of bitstreams: 3 Green_Karyn_M_MS.pdf: 35887684 bytes, checksum: 4d8ec8bef5ab4e9e6aabee4e3ff410a5 (MD5) Green_Karyn_M_MS_ABS.pdf: 507343 bytes, checksum: 0d504c63e61c048bbb16c0ee4bce83fa (MD5) license.txt: 4813 bytes, checksum: …