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Showing 1 to 1 of 1 for “"wafer breakage"”.
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Residual Stress Effects on Power Slump and Wafer Breakage in GaAs MESFETs
… and investigate the role of device processing on wafer breakage. All three objectives were successfully met. The single crystal stress technique uses a least squares analysis of X-ray diffraction data to calculate the full stress tensor. In this way, precise non-destructive stress measurements can …