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Showing 1 to 14 of 14 for “"unbalanced magnetron"”.
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The microstructure and properties of unbalanced magnetron sputtered CrN[x] coatings.
… current experiments in a rather non-conventional magnetron sputtering parameter window: a combination of a high substrate bias voltage (> -200 V) and a high partial pressure of nitrogen (a multitude of the argon partial pressure). This phase shows a strong {100} preferred crystallographic …
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Deposition and characterisation of (Ti,Zr) based hard compound and multi-layer PVD films.
… for use in steered cathodic arc evaporation and unbalanced magnetron sputter PVD techniques. A hot isostatic pressing technique was used to manufacture a range of prototype targets by diffusion bonding of appropriate metallic segments to controllable depths. In steered arc evaporation trials, a …
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Structure Evolution of Biaxially Aligned Thin Films Deposited by Sputtering
… films are deposited on an inclined substrate by unbalanced magnetron sputtering. Biaxially aligned thin films are polycrystalline thin films whereby the crystallographic orientation of the grains is aligned along two axes, i.e. perpendicular (out-of-plane) and parallel (in-plane) to the …
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Engineered surfaces for enhanced performance using thin film coating
… Whilst nickel/aluminium has been deposited using unbalanced magnetron sputtering for thermal barrier applications, a separate investigation was carried out involving the deposition and characterisation of diamond like carbon (DLC) coating using plasma enhanced chemical vapour deposition (PECVD). …
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Analytical studies of corrosion and wear resistant CrN/NbN superlattice PVD coatings.
… has been achieved by the combined cathodic arc/unbalanced magnetron PVD technique (Arc Bond Sputter) with a coating thickness of 3.0 pm at bias voltages Ubeta of -75 and -95 Volts. The coatings exhibited a preferred {111} texture, good adhesion properties and plastic hardness of 38 to 69 GPa. …
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Development and characterisation of novel low-friction wear-resistant multiplayer nanocomposite CrAlTiCN coatings
… carbon content up to 24.34 at% by closed-field unbalanced magnetron sputtering of graphite target. The microstructure of the CrAlTiCN coatings mainly depends on their carbon content. When the carbon content is low, carbon atoms are mainly dissolved in the fcc metastable phase (Cr, Al, Ti) (C, …
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Development of high temperature/oxidation- resistant PVD coatings for cutting tools using HIPIMS
… coatings have been developed through combine DC Unbalanced Magnetron (UBM) and High Power Impulse Magnetron Sputtering (HIPIMS) deposition technologies. The properties of the coatings lend themselves to the application of protecting cutting tools exposed to harsh environment such as the dry, …
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Growth defects in CrN/NbN coatings deposited by HIPIMS/UBM techniques
In recent years, high power impulse magnetron sputtering (HIPIMS) has caught the attention of users due to its ability to produce dense coatings. However, microscopic studies have shown that HIPIMS deposited coatings can suffer from some surface imperfections even though the overall number of …
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Novel components by magnetron sputtering
The advent of the closed field unbalanced magnetron sputtering (CFUBMS)technique has provided a novel method for the production of ultra thick (above50(jm) multilayer coatings, which form free standing foils when removed from thesubstrate. Applications for this method range from the production of …
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Bio-inspired surface engineering for hydrophobicity
… F-DLC films were prepared by closed-field, unbalanced, magnetron sputtering (CFUBMS) on silicon substrate to study their wetting and mechanical properties. The influences of CF4 and C2H2 gas addition during fabrication on these properties were explored by measuring contact angles, fluorine …
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Development of PVD coating processes informed by plasma diagnostics.
… stages of the project a novel high power pulsed magnetron sputtering (HIPIMS) process utilising peak power densities of 3000 Wcm[-2] was investigated. OES studies showed the first evidence of doubly charged Cr and Ti ions generated by the HIPIMS discharge. Peak plasma densities of 10[13] cm[-3] …
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[57]Fe Mossbauer studies of surface interactions in a PVD process.
A critical stage of the combined steered arc and unbalanced magnetron process is the metal ion pre-treatment which improves the adhesion of the TiN coating. In this study, Conversion Electron Mossbauer Spectroscopy (CEMS) has been used to investigate surface interactions in a commercial Arc Bond …
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Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system
… we developed an RF-assisted closed-field dual magnetron sputtering system. The “prototype” system consists of a 3-inch unbalanced dual magnetron operated at a closed-field configuration. An RF coil was fabricated and placed between the two magnetron cathodes to initiate a secondary plasma. The …
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Lattice dynamics and electron/phonon interactions in epitaxial transition-metal nitrides
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2015-09-29 without embargo terms