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Showing 1 to 1 of 1 for “"ultra-smooth thin film"”.
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Role of growth inhibitors in nucleation and growth of thin film deposited by chemical vapor deposition in high aspect ratio structures
… inhibitors in the nucleation and growth of thin films by chemical vapor deposition (CVD). We focus on steady state processing methods using stable molecules in order to change thin film surface morphology in a controlled manner in high aspect ratio structures. The results also provide …