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Showing 1 to 5 of 5 for “"tungsten nitride"”.
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Process Evaluation and Characterization of Tungsten Nitride as a Diffusion Barrier for Copper Interconnect Technology
… of this research examines the potential use of tungsten nitride as a diffusion barrier by characterizing the interfacial properties with Cu and evaluating its process capability for industrial use. Tungsten nitride (β-W2N) development has been carried out using a plasma enhanced chemical vapor …
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Synthesis, Microstructural Evolution, and Properties of Polycrystalline and Epitaxial Metastable Titanium Tungsten Nitride Alloy Layers
Epitaxial TiN/Ti0.53W0.47N superlattices with periods Lambda ranging from 16 to 205 A were also grown on MgO(001) substrates at 600°C. The superlattices were single crystals exhibiting coherent interfaces and nearly fully strained. All samples showed metallic behavior while resistivities …
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Assessing materials quality for high efficiency electricity generation
… RCA clean, RCA clean followed by an HF dip, tungsten nitride ALD, and tetracene evaporation using various combinations of these steps to form appropriate process flows. It was found that the highest surface quality was obtained by the lowest doped wafers. Additionally, similar doping levels …
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A novel approach to the scalable production of nanoporous silicon membranes for applications in water and energy
… atomic layer deposition of alumina, titania, and tungsten nitride onto the surface and pore walls of the porous silicon, highlighting its morphological and chemical tunability. Utility of the material is demonstrated via its implementation in three industrially relevant use cases. As a …
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Synthesis, characterization and reactivity of tungsten oxynitride
High surface area tungsten oxynitride samples have been prepared by the temperature programmed reaction (TPR) of W0₃ with NH₃. All samples were characterized by X-ray diffraction (XRD), nitrogen physisorption, and CO chemisorption. In addition, some sample compositions were determined by elemental …