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Showing 1 to 2 of 2 for “"triple patterning"”.
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Layout decomposition for triple patterning lithography
… satisfying the quality requirements. {\em Double patterning lithography} (DPL) utilizes two litho exposures to manufacture features on the same layer. Features are assigned to two masks, with each mask going through a separate litho exposure. With one more mask, the effective pitch is doubled, …
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Routing algorithms for electronic design automation
… emerging problem in IC routing that we study is triple patterning lithography (TPL) aware routing. As technology continues to scale to 14nm node, double patterning lithography (DPL) is pushed to near its limit. TPL is a considerable and natural extension along the paradigm of DPL. With an extra …