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Showing 1 to 2 of 2 for “"thin-film bulk acoustic resonator"”.
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ALN/ALSCN Acoustic Resonant Systems Based on Ultra-Thin Piezoelectric Films
… is to introduce several advances into ultra-thin aluminum nitride/aluminum scandium nitride (AlN/AlScN) based acoustic resonant systems. Various microelectromechanical system (MEMS) acoustic resonators — surface acoustic wave (SAW), thin-film bulk acoustic resonator (FBAR), and Lamb wave …
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Molecular characterization of methylated circulating tumour DNA biomarkers and their detection with low-cost biosensor
… mass-sensitive biosensing device known as Thin Film Bulk Acoustic Resonator (TFBAR). In-liquid biosensing of these targets with TFBAR sensor was demonstrated based on the ability of these devices to detect mass changes at the surface by tracking the resonance frequency. With optimal surface …