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Showing 1 to 1 of 1 for “"thin films, spatial atomic layer deposition, photovoltaic, solar, aluminium oxide, zinc oxide"”.
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FUNCTIONAL THIN FILMS BY SPATIAL ATOMIC LAYER DEPOSITION FOR PHOTOVOLTAIC APPLICATIONS
… focuses on the development and analysis of thin films deposited by spatial atomic layer deposition for application in the photovoltaic industry. The atomic layer deposition technique offers good uniformity, conformality and precise film thickness control. The spatial atomic layer deposition …