Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 8 of 8 for “"thin film stress"”.
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Microelectromechanical (MEMS) structures for thin film property measurement
… electrically-actuated structures to determine thin film mechanical properties, including intrinsic stresses of deposited metal films. An overview of the importance of thin film stress measurement and the advantages of this particular MEMS-based technique provides motivation for this study. A …
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Stress and structure evolution during Volmer-Weber growth of thin films
To investigate stress evolution during film deposition, a novel electrical technique for in situ thin film stress measurements was developed utilizing piezoresistive silicon microcantilevers, or piezocantilevers. In addition to the thin film stress measurements of Cu made with the piezocantilevers, …
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Fabrication of extremely smooth blazed diffraction gratings
… number materials, such as gold. Deposition of thin metal film often develops residual stress that adds out-of-plane distortion. In this thesis the out-of-plane distortions due to thin metal films are analyzed using wavefront aberration functions known as the Zernike polynomials. The thin film …
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High-Precision Stress Measurement in Thin Films for X-Ray Mirrors
… makes them susceptible to deformations caused by stress in their reflective coatings. Much research has been dedicated to figuring coated mirrors that have been deformed by their coatings and in creating low stress coatings. These coatings need to be stable over decades for the length of the …
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Design, Fabrication, and Characterization of a Thin-Film Nickel-Titanium Shape Memory Alloy Diaphragm for Use in Micro-Electro-Mechanical Systems
<p>Previous work done at Cal Poly has shown that thin-film nickel-titanium (NiTi) can be easily sputtered onto silicon wafers and annealed to create a crystallized shape memory alloy (SMA) film. Initial work on creating devices yielded cantilevers that were highly warped due to thin-film stress …
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Processing - structure - property interrelationships of ferroelectric thin films with emphasis on formation kinetics
… has many interesting properties. Recently, PZT thin films have been considered as one of the most promising materials for the application of nonvolatile electronic memories. In this study, a sol-gel process for PZT film preparation was adopted and greatly modified. PZT films with very desirable …
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Technology, science, and environtmental impact of a novel Cu-Ag core-shell solderless interconnect system
… solder paste development and prototyping, silver thin film stress relaxation and dewetting kinetics, and the environmental impacts associated with this new technology. ^ First, an evaluation of the starting particle consistency and sintered compact mechanical properties determined that a specific …
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Formation and characterization of SrBi 2 Ta 2 O 9 (SBT)thin film capacitor module with Platinum-Titanium bottom and Platinum top electrodes
… SBT at different temperatures and at different film thickness are analyzed. The higher the crystallization temperature the larger the SBT grains and the higher the polarization values. The thinner the SBT films the more secondary phases are observed. In addition the results of the …