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Showing 1 to 3 of 3 for “"thin film oxides"”.
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ENGINEERING STRUCTURE AND PHASE VIA TEMPERATURE MANIPULATION IN THIN FILM OXIDES GROWN BY ALD
Atomic Layer Deposition (ALD) is a critical thin film deposition technology with applications spanning microelectronics, solar fuels and biological preservation due to its advantages of a wide precursor library for the majority of the periodic table, exquisite control over growth rates, and the …
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Mild wear in dry and lubricated sliding systems
… -Fe. Unlubricated wear was found to occur via a thin film logarithmic oxide growth followed by agglomeration into thicker oxide plateaux 2 to 10 m in thickness. Lubricated wear occurred via thick film diffusion controlled oxide growth producing homogeneous oxide plateaux 0.1 to 0.2 m in …
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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
… the plasma chemistry and energetics, and the thin film composition and structure evolution of transition metal oxide thin films deposited by magnetron sputtering in an Ar/O2 atmosphere is investigated as a function of the O2 partial pressure (p(O2)). The previously reported composition of …