Global ETD Search
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Showing 1 to 1 of 1 for “"thermomechanical lithography"”.
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Fundamentals of heat transfer and thermal-mechanical control for improved atomic force microscopy
… performs multiple iterations of parallel nanolithography and topography imaging. Heated cantilevers are limited in their ability to precisely measure and control tip-sample forces due to parasitic resonances introduced by conventional piezoelectric actuators. This dissertation presents the …