Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 5 of 5 for “"thermomechanical in-plane microactuator"”.
-
Fully Compliant Tensural Bistable Mechanisms (FTBM) with On-Chip Thermal Actuation
… Tensural Bistable Mechanism (FTBM) class is introduced. The class consists of fully compliant linear bistable mechanisms that achieve much of their displacement and bistable behavior through tension loading of compliant segments. Multiple topologies of designs arising from the FTBM class were …
-
Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators
As technology advances and engineering capabilities improve, more research has focused on microscopic possibilities. Microelectromechanical systems (MEMS) is one area that has received much attention recently. Within MEMS much research has focused on sensing and actuation. This thesis presents work …
-
Design of Piezoresistive MEMS Force and Displacement Sensors
… Systems) sensors are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. Much research has focused on improving sensor precision, range, reliability, and ease of manufacture and operation. One exciting possibility for improving …
-
Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
<p>The electrothermomechanical characteristics of an electrically-heated polycrystallinesilicon microactuator are explored. Using finite-difference techniques, an electrothermal model based on the balance of heat dissipation and heat losses is developed. For accurate simulation, the relevant …
-
Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning
This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the …