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Showing 1 to 1 of 1 for “"thermal expansion device"”.

  1. Thermal Microactuators for Microelectromechanical Systems (MEMS)

    … energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators …

    byu Repository record for Thermal Microactuators for Microelectromechanical Systems (MEMS) (opens in a new tab)