Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 10 of 10 for “"thermal actuator"”.
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Development of Micro Thermal Actuator with Capactive Sensor
… analysis (FEA) model of an indirect heating thermal actuator. The heat transfer mechanisms are investigated and the conductive heat transfer is found to be the dominant heat transfer mode. A model simplification method is discussed and used in the analysis to reduce the degrees of freedom and …
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A bidirectional MEMS thermal actuator as the building block for a programmable metamaterial
This thesis presents a novel bidirectional MEMS thermal actuator that is intended to be implemented as the building block for a microarchitectured material. The successful proof of concept demonstrates the potential for a new level of miniaturization for the technology that would improve existing …
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Characterization of the mechanical properties of freestanding platinum thin films
… is comprised of a microfabricated cascaded thermal actuator system and test specimen. The cascaded thermal actuator system is capable of providing tens of microns of displacement and tens of milli-Newton forces simultaneously while applying a relatively low temperature gradient across the …
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Modeling and Control of Surface Micromachined Thermal Actuators
… the transient and steady-state response of thermal microactuators is desirable to provide guidance for design and operation. However, modeling the full response of thermal actuators is challenging due to the temperature-dependent material properties and nonlinear deformations that must be …
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Design, Fabrication, and Characterization of a MEMS Based Thermally Actuated Fabry-Pérot Interferometer.
… QED research. This thesis describes a MEMS based thermally actuated Fabry-Pérot cavity interferometer that has potential as a displacement sensing mechanism for use in material testers and other devices which require motion feedback. Additionally the device has a potential application as a …
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MEMS enabled Fabry-Perot cavity for cQED experiments
… thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other …
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Optimization Of A Non-Contact Single Phase Drive Ultrasonic Micromotor: Via Design And Analysis Of Engineered Stator Curvature And Surface Acoustic Streaming Actuators
… and coupling of the ultrasonic motor. A thermal actuator driven gripper actuator is used as a braking mechanism, but experimentally seen to control not only the speed but also the direction of the rotor motion by modulating the rotor gripper gap in nanometer dimensions. Analysis and …
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Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
… electrically-heated polycrystallinesilicon microactuator are explored. Using finite-difference techniques, an electrothermal model based on the balance of heat dissipation and heat losses is developed. For accurate simulation, the relevant temperature dependent properties from the microactuator …
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On-Chip Actuation of Compliant Bistable Micro-Mechanisms
… be switched in either direction using on-chip thermal actuation. The energy storage and bistable behavior of the mechanisms are achieved through the elastic deflection of compliant segments. The pseudo-rigid-body model was used for the compliant mechanism design, and for analysis of the …
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
<p>Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in …