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Showing 1 to 1 of 1 for “"themomechanical inplane micromechanisms"”.
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
… µm in two directions. Thermomechanical In-plane Micromechanisms (TIMs) were the third group tested. They produced a linear motion up to 20 µm. The fourth group was the Rapid Expansion Bi-directional Actuators (REBAs). These microactuators were bi-directional and produced up to 12 µm deflection in …