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Showing 1 to 20 of 23 for “"surface kinetics"”.
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Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas
… an appropriate physical model to describe the surface kinetics including simultaneous etching and deposition. A novel surface kinetic model, the translating mixed-layer (TML) model, has been developed. ABACUSS II, a modeling environment and simulator was used for solving differential algebraic …
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Study of surface kinetics in PECVD chamber cleaning using remote plasma source
… (TCTP); to understand gas phase reactions and surface reactions of neutrals in the cleaning chamber by analyzing the concentration of neutrals in downstream cleaning process chamber; and to make a global model that predicts the partial pressure of active species in the cleaning chamber. The …
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Study of plasma-surface kinetics and simulation of feature profile evolution in chlorine etching of patterened polysilicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.
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Study of plasma-surface kinetics and feature profile simulation of poly-silicon etching in Cl²/HBr plasma
… characterized the Cl2/HBr ion enhanced plasma-surface interactions with poly-silicon as a function of the gas composition, ion energy, ion incident angle and other important process parameters. A realistic inductively coupled plasma beam apparatus capable of generating ions and neutrals …
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Modeling of Kinetically Limited Growth Rate for Solution-Synthesized Germanium Nanocrystals
… is developed that considers both diffusion and surface kinetics. The diffusion coefficient of Ge monomers through the solvent, octadecene, at elevated synthesis temperatures is estimated to be on the order of 10-5 to 10-4 cm2/sec, while the mass transfer boundary layer thickness is estimated to …
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Experimental and Theoretical Investigation of Pitting Corrosion of Nickel in Chloride Solution
… as a function of the applied potential. The pit surfaces were crystallographic, although the general shape of the pits observed was approximately hemispherical. A mathematical model was developed to simulate pitting under stagnant conditions in an axisymmetric domain which closely resembled the …
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A theoretical study of surface kinetic processes in the Mbe growth of compound semiconductors
The surface kinetics processes in the molecular beam epitaxy (MBE) growth of GaAs (100) and the MBE doping kinetics are studied theoretically, using a stochastic model which is based on the master equation approach and random distribution approximation. The kinetic processes included in the model …
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Surface ordering of MBE grown 001 gallium(05) aluminum(05) arsenic: A theoretical study
The surface kinetics of MBE growth of 001 {dollar}Ga\sb{x}Al\sb{1-x}As{dollar} is studied theoretically using the stochastic model which is based on the master equation approach and random distribution approximation. The kinetic processes included in the model are adsorption and surface migration. …
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Hard and tough electrodeposited aluminum-manganese alloys with tailored nanostructures
… nuclei dominates. Leveraging the effects of surface kinetics at the electrode on the alloy microstructure, a reverse-pulse current waveform is designed to tailor the grain size and phase distribution of the electrodeposits; single phase FCC alloys with nanocrystalline grains, as well as …
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Laboratory Studies of Gas-Grain Processes on Cosmic Dust Analogues
… (ISM) takes place both in the gas phase and on surfaces of cosmic dust grains. Gas phase reactions alone are found to be insufficient to account for the observed abundance of molecules such as molecular hydrogen, water, carbon dioxide, methanol as well as many other complex molecules; grain …
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Feature profile evolution during the high density plasma etching of polysilicon
… Carlo techniques to compute the transport and surface kinetics combined with a cellular representation of the feature. Using the Monte Carlo algorithm permitted the incorporation of all dominant physical and chemical mechanisms of the etching process such as angle-dependent ionenhanced etching, …
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Ether Chemistry On Si(100) And Desorption Kinetics Of Corresponding Alkyls And Alkoxides
The desorption kinetics of a series of alkyls and alkoxides from the Si(100) surface weremeasured to investigate the details of the hydride elimination desorption mechanism.Following the analysis of temperature programmed desorption experiments inconjunction with electronic structure calculations, …
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Radiation Transport in Low Pressure Plasmas: Lighting and Semiconductor Etching Plasmas
… materials processing, the role of UV photons in surface processes is a side product and is poorly understood. Since the basic surface reaction mechanisms in semiconductor processing are now being developed, it is an opportune time to investigate the role of UV photons. As lamp geometries become …
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Membrane-supported hydrogen/syngas production using reactive H₂O/CO₂ splitting for energy storage
… data, an oxygen flux model incorporating the surface kinetics and ion transport is developed, in which the oxygen direct-incorporation kinetics are used on the feed-side, and the Mars-van Krevelen (MvK) mechanism for fuel (H₂, CO or CH₄) oxidation reactions are applied on the sweep-side. The …
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Electro-chemo-mechanical Studies of Perovskite-Structured Mixed Ionic-Electronic Conducting SrSni-₁₋xFexO₃₋x/₂₊[epsilon]
… is significant loss in efficiency, of which slow surface reaction kinetics at the cathode are most responsible. Previously, the mixed ionic and electronic conducting (MIEC) perovskite-structured SrSni-₁₋xFexO₃₋x/₂₊[epsilon] (STF) materials system was identified as a promising candidate for SOFC …
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Lattice-mismatched epitaxy of AlInP and characterization of its microstructure and luminescence
… behavior of constituent atoms on the growth surface. Historically, lattice matching of the ternary alloy to a substrate is another important constraint that limits access to all but a few alloy fractions. A technologically important ternary alloy in which both surface kinetics and lattice …
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Rotary (redox) reactor-based oxy combustion chemical looping power cycles for CO₂ capture : analysis and optimization
… model is developed, retaining finite rate surface kinetics and internal heat transfer within the reactor. This model is integrated with a detailed system model and used for optimization, parametric analysis and characterization of the relative techno-economic performance of different oxygen …
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Shadow mask assisted heteroepitaxy of compound semiconductor nanostructures
… and III-V compounds are governed by different surface kinetics. Coexisting secondary fluxes of both constituent species and the apparent non-existence of surface diffusion are characteristic for SMMBE of II-VI compounds. In contrast, III-V SMMBE is governed by the interplay between secondary …
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Nucleation inhibition and enhancement in chemical vapor deposition
… of metal on metal (i.e., not on non-metallic surfaces) or oxide on oxide (i.e., not on metallic surfaces), but nanomanufacturing also demands other film-substrate combinations such as deposition of metal on one oxide vs. another oxide or a metal surface. In this dissertation, I report one …
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Application of low PO2 iron-based oxides for decarbonising steel industry via chemical looping
… temperatures cause an improvement. Assuming the kinetics of C<sub>2</sub>F) in combusting CO controlled by surface kinetics, led to the hypothesis that dopants of CeO<sub>2</sub>, CuO, and NiO impregnated onto the C<sub>2</sub>F) structure would improve rates of reaction. However, redox cyclic in …
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