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Showing 1 to 1 of 1 for “"strontium bismuth tantalum oxide"”.
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Reliability and processing of ferroelectric thin film capacitors with emphasis on fatigue and etching
… replacing the metal electrodes with conducting oxide electrodes such as RuO₂. The oxide electrode/PZT capacitors were characterized for their diffusion barrier properties, perovskite phase formation, interface nature and ferroelectric properties. The results indicate that these oxide electroded …