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Showing 1 to 20 of 25 for “"sputtering yield"”.
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Multi-fidelity machine learning methods for sputtering yield calculations relevant to magnetic fusion energy systems
Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2026-12-01
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Molecular dynamics simulations of the bombardment of iron by chromium ions.
… represent the energetic interaction range. The sputtering yield increases with energy showing an enhancement at crystal temperature 700 K, the same as for adatom formation. Defect production, such as vacancies and interstitials, increase in general with energy, and their distribution profiles …
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Experimental and Modeling Studies of Low-Energy Ion Sputtering for Ion Thrusters
… low-energy xenon-molybdenum (Xe+-Mo) sputtering yields for ion energies of 100 eV and less. Sputtering yield data at these energies are important for ion thruster design and lifetime prediction. The basic principles of sputtering phenomena are discussed. An overview of various popular …
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Atomistic Simulation Of Plasma Interaction With Plasma Facing Components In Fusion Reactors
… particles to investigate retention, deposition, sputtering, erosion, blistering effects, diffusion, and so on.</p> <p>The deuterium bombardment of monocrystalline tungsten was modeled by LAMMPS code using Tersoff type interatomic potential. The deuterium trapping rate, implantation depth, and …
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Modeling of high fluence Ti ion implantation and vacuum carburization in steel
… for diffusion and mixing processes, as well as sputtering and lattice dilation. A Gaussian distribution of Ti was assumed to be incorporated at each time interval. The effects of sputtering and lattice dilation were then included by means of an appropriate coordinate transformation. C was …
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Kinematic and Thermodynamic Effects on Liquid Lithium Sputtering
Results suggest that preferential sputtering of deuterium atoms over lithium atoms in D-treated samples significantly decrease the absolute sputtering yield of lithium by at least 60% in the case of He+ bombardment. The secondary sputtered ion fraction for lithium bombardment has been measured for …
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Creation of Surface and Bulk Defects of Germanium and Surface Roughening of Germanium During High Energy Ion Irradiation
… morphology produced by curvature dependent sputtering yield.
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Harmonic Sputtering Theory
<p>ABSTRACT</p> <p>HARMONIC SPUTTERING THEORY</p> <p>By</p> <p>ZHU LIN ZHANG</p> <p>February 2010</p> <p>Advisor: Dr. Karur R. Padmanabhan</p> <p>Major: Physics</p> <p>Degree: Doctor of Philosophy</p> <p>Based on the standard Botzmann equation in Classical Statistics Mechanics, we have derived a …
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Modeling enhanced impurity sputtering due to rf sheaths in front of ICRH actuators
… Heating (ICRH) is the enhanced impurity sputtering phenomenon due to the emergence of RF sheaths near the Faraday Screen of the ICRH antenna. Here we present a semi-analytical fluid plasma model able to capture the enhanced sputtering yield from the Faraday Screen and the Plasma- Facing …
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Temperature-Enhanced Low-Energy Ion Sputtering of Liquid Tin: Measurements and Modeling
… and the observation of temperature-enhanced sputtering of Sn under low energy, light ion bombardment motivated further investigation of the temperature-dependent sputtering properties of Sn under various conditions. Experimental measurements using a well-characterized ion beam and a …
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Low-Energy Ion-Induced Angularly-Resolved Sputtering Measurements
The phenomenon of ion-induced sputtering is integral to many applications. In magnetically confined fusion this sputtering is important for both the lifetime of plasma facing components as well as contamination of the plasma. In plasma processing the sputtering process is involved in etching …
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Low energy implantation of boron with decaborane ions
… be implanted at low energy into Si is limited by sputtering as the ion beam sputters both the matrix and, the implanted atoms. As the number of sputtered B atoms increases with the implanted dose and approaches the number of the implanted atoms, equilibrium of B in Si is established. This effect …
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Quantification of Chemical Erosion in the Divertor of the DIII-D Tokamak
… control. Understanding and quantifying chemical sputtering is therefore key to the success of fusion as a clean energy source. The principal goal of this thesis is to design and carry out experiments, then analyze and interpret the results in order to elucidate the role of chemical sputtering in …
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Studies of diamond film growth using atom beam sources
… and intensity variation of the graphite sputtering yield. The etch rate of diamond has been shown to possess a temperature dependence not previously reported. A new atom source has been built, allowing enhanced versatility in adjusting the hydrogen intensity, and incorporating an …
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Effects of porosity on surface chemistry, wetting, and percolation in porous tungsten, liquid lithium hybrid plasma facing component system
… melting point, high thermal conductivity and low sputtering yield. However, challenges remain for the use of monolithic tungsten under future fusion reactor-relevant conditions including enhanced hydrogen retention, surface cracking and surface morphology evolution that may lead to macro-level …
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Real-time RBS analysis of plasma erosion in DIONISOS
… ion flux (a function of plasma density) and the sputtering yield (a function of ion energy), while being inversely proportional to the target density. The goal will be to develop a reliable method to characterize plasma regimes with reproduceable, well-behaved flux profiles and use them to …
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Investigation of plasma potential enhancement in the scrape-off layer of ion cyclotron range of frequencies heated discharges on Alcator C-Mod
… on Alcator C-Mod are associated with enhanced sputtering of molybdenum plasma facing surfaces and increased levels of core impurity contents, which subsequently degrade the core plasma performance. RF sheath rectification on open magnetic field lines that intercept material surfaces is …
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F-TRIDYN: A Monte-Carlo, BCA code for modeling ion-surface interactions with rough materials and coupling plasma and material codes
… role in ion irradiation processes such as sputtering; roughness can significantly increase the angle of maximum sputtering and strongly affect the sputtering yield. The complete effect of surface roughness on sputtering and other ion irradiation phenomena is not completely understood. Many …
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Ion assisted magnetron sputtering of tantalum thin film deposition and characterization
… films during their deposition by magnetron sputtering process, and to gain understanding of the mechanism of the ion-solid interactions during the thin film growth. Tantalum (Ta) exists in two distinct crystallographic phases: a stable [alpha]-phase with a body centered cubic (bcc) lattice …
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Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering
High Power Impulse Magnetron Sputtering (HiPIMS) or High Power Pulsed Magnetron Sputtering (HPPMS) is a magnetron sputtering method that has proven to be a promising ionized physical vapor deposition (PVD) technique, with industrial implementation hindered by low deposition rates. HiPIMS applies …
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