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Showing 1 to 1 of 1 for “"spatial phase diagram"”.
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Spectroscopic Ellipsometry Studies of Thin Film a-Si:H Solar Cell Fabrication by Multichamber Deposition in the n-i-p Substrate Configuration
… minimum loss in device performance. Deposition phase diagrams for both i- and p-layers on 2" x 2" rigid borosilicate glass substrate were developed as functions of the hydrogen-to-silane flow ratio in PECVD. These phase diagrams were correlated with the performance parameters of the …