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Showing 1 to 1 of 1 for “"simultaneous reflection and transmission measurement"”.
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Scandium Oxide Thin Films and Their Optical Properties in the Extreme Ultraviolet
This study reports on the physical and optical characterization of scandium oxide thin films. Thin films of scandium oxide, 20-40 nm thick, were deposited on silicon wafers, quartz slides, and silicon photodiodes by reactively sputtering scandium in an oxygen environment. These samples were …