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Showing 1 to 1 of 1 for “"silicon surface micromachined device"”.
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CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
This paper introduces silicon surface micromachined devices, and primarily focuses on the characterization of a silicon-surface gyroscope and a laterally isolated accelerometer. Unlike most micromachined gyroscopes that consist of a single resonator, this gyroscope takes advantage of two …