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Showing 1 to 3 of 3 for “"silicon nanostructure"”.

  1. Fabrication of high aspect ratio silicon nanostructure arrays by metal-assisted etching

    … the mechanisms involved in the fabrication of silicon nanostructures using metal-assisted etching. We developed a method utilizing metal-assisted etching in conjunction with block copolymer lithography to create ordered and densely-packed arrays of high-aspect-ratio single-crystal silicon

    mit Repository record for Fabrication of high aspect ratio silicon nanostructure arrays by metal-assisted etching (opens in a new tab)

  2. Modification of an ultra-high-vacuum scanning tunneling microscope for silicon nanostructure fabrication

    … precursor gas to the tip-ample junction during silicon nanostructure growth. The updated cooling plate is able to shorten the total sample preparation time from 6 hours to 3 hours. The capillary doser lowers the base pressure during the silicon growth experiment by two orders of magnitude. The …

    uiuc Repository record for Modification of an ultra-high-vacuum scanning tunneling microscope for silicon nanostructure fabrication (opens in a new tab)

  3. Electrical and thermal transport in 2- and 3-dimensional periodic holey silicon

    Silicon, one of the most abundant elements on earth, is a promising candidate for thermoelectric applications in the form of different nanostructures. It has been conclusively demonstrated that boundary scattering in nanostructured silicon e ectively reduces thermal transport, resulting in an …

    uiuc Repository record for Electrical and thermal transport in 2- and 3-dimensional periodic holey silicon (opens in a new tab)