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Showing 1 to 5 of 5 for “"silicon nanomembranes"”.

  1. Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes

    … connected counterparts. Initially, connected nanomembranes patterned in a thin layer of silicon on glass were released in hydrofluoric acid where surface tension caused them to float flat. Their fragility inspired novel handling and position manipulation techniques for layer-to-layer …

    mit Repository record for Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes (opens in a new tab)

  2. Three-dimensional (3D) electronics by compressive buckling process

    … buckling process. Highly phosphorus doped silicon nanomembranes from a silicon-on-insulator wafer are transfer-printed onto the 3D structures and introduce changes of the electrical properties under compressive strain. A commercial chip from X-FAB Semiconductor Foundries is successfully …

    uiuc Repository record for Three-dimensional (3D) electronics by compressive buckling process (opens in a new tab)

  3. Materials and designs for 3D conformal electronics with capabilities in cardiac mapping and stimulation

    … conductive composite for tactile sensors, silicon nanomembranes for strain gauges, iridium oxide for pH sensors, gallium nitride and gallium arsenide for optoelectronics, metal thin films for temperature sensing, and nanotextured electrode coatings for characterizing electrical activities. …

    uiuc Repository record for Materials and designs for 3D conformal electronics with capabilities in cardiac mapping and stimulation (opens in a new tab)

  4. Characterization of Dopant Diffusion in Bulk and lower dimensional Silicon Structures

    … departure from the current planar MOSFET on bulk silicon substrate is required to push the scaling limit further while maintaining electrostatic control of the gate over the channel. Alternative device structures that allow better control of the gate over the channel such as reducing short channel …

    vt Repository record for Characterization of Dopant Diffusion in Bulk and lower dimensional Silicon Structures (opens in a new tab)

  5. Multifunctional wearable fingertip electronics

    … with electrode arrays multiplexed using silicon nanomembrane diodes (Si NM), high-­sensitivity strain monitoring with Si NM gauges, and tactile sensing with elastomeric capacitors. Experiments have been conducted for each of the devices to demonstrate the expected functionalities. …

    uiuc Repository record for Multifunctional wearable fingertip electronics (opens in a new tab)