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Showing 1 to 1 of 1 for “"silicon machining"”.
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Design and Analysis of End-Effector Systems for Scribing on Silicon
… scribing is a method of patterning silicon to selectively deposit a monolayer of material on the surface of the silicon. This thesis details the development of a unique end-effector for chemomechanical scribing using a compliant mechanism solution. The end-effector is developed to …