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Showing 1 to 4 of 4 for “"silicon carbonitride"”.
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Reactive Plasma Etching of Silicon Carbide, Silicon Carbonitride, and Titanium Nitride in a Tetrafluoroethane/Oxygen Plasma
… the etching of the diffusion barrier between the silicon substrate and the 1ow-k dielectric material. We will use silicon carbide (SiC), silicon carbonitride (SiCN), and titanium nitride (TiN) as our diffusion layer. Using the RF plasma and the magnetron gun with 1,1,1,2 tetrafluoroethane and …
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Characterization of amorphous silicon carbide and silicon carbonitride thin films synthesized by polymer-source chemical vapor deposition mechanical structural and metal-interface properties
Amorphous silicon carbide (a-SiC) and silicon carbonitride thin films have been deposited onto a variety of substrates by Polymer-Source Chemical Vapor Deposition (PS-CVD). The interfacial interaction between the a-SiC films and several substrates including silicon, SiO[subscript 2], Si[subscript …
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Ceramic Microreactors for on-Site Hydrogen Production
… composed of high surface area, inverted beaded silicon carbide (SiC) or silicon carbonitride (SiCN) porous monoliths integrated within high-density alumina reactor housings. Subsequent characterization of these novel ceramic microreactors for on-site H2 production was performed using the …
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Smart material composites for magnetic field and force sensors
… of current generation pressure sensors based on silicon. In this study, we focus on two composites systems: ferrite / Terfenol-D / nickel — lead zirconate titanate (magnetoelectric); and lanthanum strontium manganate (LSMO) — carbon nanotube (CNT) – silicon carbonitride (SiCN) (piezoresistive). …