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Showing 1 to 5 of 5 for “"scandium nitride"”.
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ALUMINUM SCANDIUM NITRIDE (AlScN) FILMS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
… fabrication, and characterization of Alu- minum Scandium Nitride (AlScN) films and resonator devices for applications in Micro- electromechanical systems (MEMs) especially in Fifth Generation (5G) cellular technology. Various internal stress arise during the process for developing AlScN films. …
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Crystal growth and physical properties of polycrystalline and epitaxial scandium nitride layers
Submitted by William Weathers (weathrs2@illinois.edu) on 2012-05-29T17:20:09Z No. of bitstreams: 1 2000_gall.pdf: 4326760 bytes, checksum: 3341bfdff82ff44e61d79eb785930b2c (MD5)
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ALN/ALSCN Acoustic Resonant Systems Based on Ultra-Thin Piezoelectric Films
… several advances into ultra-thin aluminum nitride/aluminum scandium nitride (AlN/AlScN) based acoustic resonant systems. Various microelectromechanical system (MEMS) acoustic resonators — surface acoustic wave (SAW), thin-film bulk acoustic resonator (FBAR), and Lamb wave resonators— were …
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Chemical Reactivity and Regioselectivity of Trimetallic Nitride Endohedral Metallofullerenes
… of biomedicine and nanomaterials. Trimetallic nitride template endohedral metallofullerenes (TNT EMFs) are some of the most promising fullerene-based materials (e.g., as MRI and X-ray contrast agents) because of their high yields compared to classic endohedral metallofullerenes. This …
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Exohedral Functionalization and Applications of the Trimetallic Nitride Endohedral Metallofullerenes
… of the Sc₃N@C₈₀ and Sc₃N@C₇₈ trimetallic nitride endohedral metallofullerenes. In addition, this dissertation discusses miscellaneous research that is relevant to the aformentioned metallofullerenes and their applications, such as the discovery of a new cage isomer <i>(D<sub>5h</sub>)</i> …