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Showing 1 to 20 of 34 for “"sacrificial layer"”.
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Dendritic Materials as a Dry Release Sacrificial Layer
… using the developed process to demonstrate a dry sacrificial etching technique. An array of cantilever beams 100 mum in width by 1000 mum in length was successfully released in 10 min. In addition, an array of microchannels was fabricated to better understand the limitations of HB560 …
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Dielectrics on Gallium Arsenide Using Silicon as a Sacrificial Layer: Formation Kinetics and Interface State Densities
… by direct nitridation or UV ozone oxidation of a sacrificial pseudomorphic epitaxial Si layer on a GaAs (100) substrate. The nitridation and oxidation process kinetics were studied by X-ray photoelectron spectroscopy (XPS). Thicknesses and compositions were obtained through the quantitative …
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Laterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications
… novel process utilizes S1813 photoresist as a sacrificial layer in conjunction with a thicker resist like AZ P4620 or SU-8 as an electroplating mold. New curing temperatures for the sacrificial layer photoresist have been determined for this purpose. LMGFET microstructures have been …
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In situ monitoring of reactive ion etching using a surface micromachined integrated resonant sensor
… free-standing mechanical movement and utilize a sacrificial layer process as the key technique to develop and release the structure on a substrate. A sacrificial layer technique that incorporates a low temperature sacrificial polymer was utilized to develop and release the suspended RIE sensor …
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Polymer Microchips for Capillary Electrophoresis and Electric Field Gradient Focusing of Biomolecules
… improved separation performance, phase-changing sacrificial materials were developed for solvent bonding of polymer microchips. Devices were fabricated by filling channels in embossed PMMA with a heated liquid that formed a solid sacrificial layer at room temperature. The sacrificial material …
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INFRARED SENSORS USING SILICON MICROSTRUCTURES
… bulk silicon micromachining using a polysilicon sacrificial layer. A titanium resistor is used as the bolometer sensitive element due to its low noise, mature fabrication technique and compatibility with CMOS process. The microbolometer fabrication is carried out using a standard CMOS foundry, …
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Fabrication of nanofluidic devices using electrochemical etching of sacrificial copper
… gold cross channels above the copper. The metal layers were then enclosed in a polymer layer with openings at the end of each channel. The copper layer was then dissolved using chemical etching, leaving an open channel with embedded gold electrodes. The majority of this work focuses on describing …
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Fabrication and material characterization of silver cantilevers via direct surface micromachining
… silver-based conductive ink for the structural layer and PMMA for the sacrificial layer. Several other materials were tested for use as sacrificial inks in addition to PMMA. Silver cantilevers with dimensions of 200x50[mu]m and 200x100[mu]m were fabricated as a demonstration of the process. The …
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Modeling and fabrication of self-assembling micron-scale rollup structures
… in residual stress between successive thin film layers causes the structures to roll up when an underlying sacrificial layer is removed. The primary structure of interest was a swiss-roll structure comprised of alternating layers of metal and insulator so that the self-assembled system forms an …
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Suspended Gate Silicon Nanodot Memory
… of devices and systems from pen drives, mp3 players to cars, planes and satellites. However,the conventional floating gate memory technology in use for flash memory is facing a serious scalability issue, the tunnel oxide thickness cannot be reduced to less than 7nm as pointed out in the latest …
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Design and fabrication of one and two axis nickel electroplated micromirror array
… technologies with a thick photoresist sacrificial layer. The torsion beams were designed with a serpentine shape in order to optimize the voltage necessary to tilt the micromirror by [plus or minus] 10o. Micromirror devices with different beam designs were designed and simulated. The …
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Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering (SERS) for IN-VITRO and IN-VIVO Applications
… Au nanostructure (conventional view) but also a sacrificial layer for the Au nanostructure on a transparent substrate (transmission view). The enhanced Raman Signal from reflection and transparent SERS substrates depended on aluminum etching methods, Au deposition angles, and Au deposition …
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Growth and application of planar III-V semiconductor nanowires grown with MOCVD
… through growth of planar InAs nanowires. Using a sacrificial layer, the transfer of planar GaAs nanowires onto silicon substrates with control over the alignment and position is presented. A metal-semiconductor field-effect transistor fabricated with a planar GaAs nanowire shows bulk-like …
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CMOS nanofluidics
… by using the transistor gate polysilicon as a sacrificial layer. A nanochannel with critical dimension of 100nm and length of 200 [mu]m is fabricated. Actuation and separation of bio-molecules in the nanochannel with electrophoresis is demonstrated. We then incorporate avalanche photodiodes …
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A carbon nanotube bearing and Stodola rotor
… electron-beam lithography. A silicon dioxide sacrificial layer is applied, followed by a polysilicon layer from which to cut out the rotor.
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Methods for nano-precise overlay in advanced in pick-and-place assembly
… wafers in N-MAP, which need to contain a buried sacrificial layer to enable nano-precise pick-and-place assembly
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Laser-induced forward transfer techniques for printing functional materials and photonic devices
… study the triazene polymer (TP)-dynamic release layer (DRL) assisted LIFT technique for solid-phase ceramic materials namely gadolinium gallium oxide (Gd-Ga-O) and ytterbium doped yttrium aluminium oxide (Yb:YAG). The dependence of the distance travelled by the shockwave and the ejected donor …
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Gibbsian Segregating Alloys Driven by Thermal and Concentration Gradients: A Potential Grazing Collector Optics Used in EUV Lithography
… period of mirror lifetime. A thin Au segregating layer will be maintained through segregation during exposure, even though overall erosion is taking place. The reflective material, Mo, underneath the segregating layer will be protected by this sacrificial layer which is lost due to preferential …
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A micromachined thermo-optical light modulator based on semiconductor-to-metal phase transition
… Silicon dioxide was deposited on a polyimide sacrificial layer by PECVD and patterned to form the structural pixel. Vanadium film was e-beam evaporated and patterned with lift-off process. It was thermally oxidized into VO_2 at 390 C. The thermal isolation pixel was anchored on substrate by …
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Technological Development of Chemical Sensors for Healthcare and Safety Applications
… with conventional cleanroom techniques. A sacrificial layer assisted pattern transfer is reported in this thesis as a fabrication strategy for the reliable patterning of metallic structures of varying shape and dimension (down to the nm range) onto the elastomer. The fabrication process …
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