Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 4 of 4 for “"remote plasma source"”.
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Study of surface kinetics in PECVD chamber cleaning using remote plasma source
… to characterize the Transformer Coupled Toroidal Plasma (TCTP); to understand gas phase reactions and surface reactions of neutrals in the cleaning chamber by analyzing the concentration of neutrals in downstream cleaning process chamber; and to make a global model that predicts the partial …
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Chemical Vapor Deposition of Transition Metal Diborides From Borohydride Precursors
… by using atomic hydrogen, produced in a remote plasma source, as the suppressor. Growth suppression by atomic nitrogen enabled bottom-up filling of a 19:1 aspect ratio trench with an Hf-B-N film.
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N2, O2, and NF3 Dissociation in a Low Frequency, High Density Plasma Source
… (4.0 Torr), inductively-coupled toroidal remote plasma source from MKS Instruments, operating at a power density of 5 – 50 W/cm3. The dissociation of O2 drops from 60% to 10% with an increase of O2 percentage. For NF3, the dissociation to form F rises with an increase of NF3 percentage …
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Ätzen von Titannitrid mit Halogenverbindungen
… Argon/NF3 Gasmischung wurde in einer externen Plasmaquelle (RPS) zerlegt und in die Reaktionskammer geschleust. Die Ätzung wurde mit in-situ Reflexionsmessung beobachtet. Experimente mit Chlorzugabe wurden unternommen und ein starker Einfluss auf den Ätzmechanismus beobachtet. Die Ätzraten des …