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Showing 1 to 1 of 1 for “"reaktive Sputter-Deposition"”.
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Sputtered tin oxide and titanium oxide thin films as alternative transparent conductive oxides
… prepared by reactive direct current magnetron sputtering (dc MS) from metallic targets. The process parameters and the doping concentration in the films have been varied. The films have been electrically, optically and structurally analysed in order to analyse the influence of the process …