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Showing 1 to 1 of 1 for “"reactive rf sputtering"”.
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Reactive Sputtering Deposition and Characterization of Zinc Nitride and Oxy-Nitride Films for Electronic and Photovoltaic Applications
… electronic and optoelectronic applications. Reactive radio-frequency (RF) magnetron sputtering was used as the deposition method, which potentially enables control of composition of the thin films, as well as fabrication of multilayer structures for the study of possible hetero-junctions …