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Showing 1 to 1 of 1 for “"pulsed PECVD"”.

  1. Design and fabrication of asymmetric nanopores using pulsed PECVD

    Kelkar, Sanket S.Colorado School of Mines. Arthur Lakes Library2015

    … desired level by deposition of material using pulsed plasma enhanced chemical vapor deposition (PECVD). Pulsed PECVD has been developed as a high throughput alternative to atomic layer deposition (ALD) to deliver self-limiting growth of thin films. The goal of this thesis is to extend the …

    colo-mines Repository record