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Showing 1 to 1 of 1 for “"process stabilisation"”.
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Strukturbildung und Prozessstabilisierung beim reaktiven Sputtern
… nitrides employed e.g. in optical coatings. The process is characterized by high deposition rates and compact films as a result of the kinetic energy input from the glow discharge. Nevertheless, this deposition technique suffers from several drawbacks such as a highly unstable transition regime …