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Showing 1 to 4 of 4 for “"polymerized films"”.
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Adherence/Diffusion Barrier Layers for Copper Metallization: Amorphous Carbon:Silicon Polymerized Films
… amorphous silicon carbon hydrogen (a-Si:C:H) films as possible diffusion barriers and replacements for SiO2 between metal levels, interlevel dielectric (ILD), or between metal lines (IMD), based upon the diffusion inhibition of previous a-Si:C:H species expected lower dielectric constants, …
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Adhesion/Diffusion Barrier Layers for Copper Integration: Carbon-Silicon Polymer Films and Tantalum Substrates
… (Ta) substrates. Carbon-silicon (C-Si) polymeric films have been formed by electron beam bombardment or ultraviolet (UV) radiation of molecularly adsorbed vinyl silane precursors on metal substrates under ultra-high vacuum (UHV) conditions. Temperature programmed desorption (TPD) studies show that …
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Drying Oils Treated by Irradiation as Coatings for Biobased Films
Biobased films are potential food packaging materials. However, their performance with respect to water and gas barrier properties is inferior to current packaging products on market. Drying oils are promising as film coatings to improve water barrier properties of protein-based films. Drying oils …
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An Investigation of Plasma Pretreatments and Plasma Polymerized Thin Films for Titanium/Polyimide Adhesion
… plasma pretreatments and novel thin plasma polymerized (PP) films were investigated as adhesion promoters. Plasma treatments were carried out using custom-built, low pressure, radio frequency, inductively coupled plasma reactors. Ti-6Al-4V coupons were plasma treated and used to prepare …