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Showing 1 to 1 of 1 for “"plasma nanosynthesis"”.
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Fabrication of metal-oxide thin-films and features on dissimilar materials via ion-assisted codeposition
… that are similar to previous work with oxygen plasma immersion. Notably, these are created with both O2+ and Ar+ ion beams. Atop this structure, the formation of nanodots is also seen. Again, these are not shown to have spatial ordering, but are larger than those seen on Si, ~75-200 nm …