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Showing 1 to 2 of 2 for “"plasma ion implantation"”.
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Fabrication of electroluminescent silicon diodes by plasma ion implantation
This thesis describes the fabrication and testing of electroluminescent diodes made from silicon subjected to plasma ion implantation. A silicon-compatible, electrically driven light source is desired to increase the speed and efficiency of short-range data transfer in the communications and …
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RF-compensated Langmuir Probe Diagnostics of Pulsed Plasma Ion Implantation System
… on the development of a method for prediction of ion implantation dose in processing plasmas. The vital variable is fluence, i.e. ion implantation dose, which is currently predicted by Lieberman model during high-voltage Plasma Ion Implantation (PII). Chapter \ref{chap:intro} starts with an …