Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 10 of 10 for “"plasma enhanced atomic layer deposition"”.
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On the Impact and Growth of Plasma-enhanced Atomic Layer Deposition High- Dielectrics on 2D Crystals
… field-effect transistors (FETs) benefit from the atomic thinness of these materials, allowing them to be aggressively scaled down while avoiding short channel effects (SCEs). Their atomic thinness also means they are physically malleable and have the potential of being integrated directly onto …
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Atomic layer deposition and electrochemical characterization of TiO2 as a potential candidate for a photoanode protective layer
… corrosion resistance performance of thin TiO2 layers deposited by means of atomic layer deposition under oxidative conditions. Despite Silicon being considered one of the most promising semiconductors for use in photoelectrodes, its instability in aqueous solutions is one of its main limiting …
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N-polar n-GaN MOSCAP and Tunnel Junctions Toward p-GaN MOSCAP
… (000), utilizing dielectric materials grown by plasma-enhanced atomic layer deposition. Additionally, this thesis presents findings from the 1st and 2nd generation GaN homojunction tunnel diodes, contributing to the fabrication of MOS capacitors on p-type GaN (0001) substrate for interface …
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Microplasma-driven, atomic layer deposition of flexible electronic and photonic nanofilms
Atomic Layer Deposition (ALD) of aluminum oxide (Al2O3), gallium oxide (Ga2O3) and Zirconium oxide (ZrO2), driven by arrays of microcavity plasmas (MALD), has been demonstrated. Microplasma has been drawn attention due to its unique characteristics such as high electron density (>1016 cm-3), low …
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High-Performance Low-Cost Catalysts for Water Electrolysis: A Computational and Experimental Study
… active, and durable TMO catalysts prepared by plasma-enhanced atomic layer deposition (PE-ALD) for the alkaline OER. A benchmark of different exchange-correlation (XC) functionals addresses the issue of the DFT level of theory for modelling the electronic structure of strongly correlated 3d …
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Thermally modulated solidly mounted resonators for applications in biosensing
… applications. Thin film ZnO was deposited using plasma-enhanced atomic layer deposition (PE-ALD) for their potential employment them as a transducer layer in these nanoscale resonators. The piezoresponse force microscopy (PFM) revealed these PE-ALD deposited ZnO films have higher piezoelectric …
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Dielettrici high-κ Al-based per 4H-SiC tramite Atomic Layer Deposition
… depositati su 4H-SiC tramite thermal e plasma enhanced-Atomic Layer Deposition (ALD). In particolare, è stata studiata la deposizione di ossido di alluminio (Al2O3), nitruro di alluminio (AlN), le loro combinazioni in stack e mixing nanometrici di Al2O3/HfO2. Le caratterizzazioni …
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Chemical vapor deposition of thin film materials for electronic and magnetic applications
Chemical vapor deposition (CVD) has been employed to pursue high quality thin film growth for four different materials with excellent electronic or magnetic properties for certain device applications. The relationship between CVD processing conditions and various thin film properties has been …
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Elucidating trends and transients in CO2 dissociation
… a light on processes that occur in non-thermal plasmas containing CO2, mostly for CO2 conversion. In particular, the focus lies on the transient behaviour of these discharges: how do these systems evolve over time before they settle in a (non-thermal) equilibrium. In addition to that, it …