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Showing 1 to 1 of 1 for “"planar magnetron system"”.

  1. Ionized Physical Vapor Deposition of Aluminum Oxide

    Li, Ning2017

    Made available in DSpace on 2017-07-06T18:55:08Z (GMT). No. of bitstreams: 3 Li_Ning_MS.pdf: 51415629 bytes, checksum: c29c8d58534efcdd114931c9fc6f3d8d (MD5) Li_Ning_MS_ABS.pdf: 619486 bytes, checksum: 41ecf59db6588595b2e30243525fce36 (MD5) license.txt: 4813 bytes, checksum: …

    uiuc Repository record