Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 12 of 12 for “"piezoelectric MEMS"”.
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Piezoelectric MEMS resonator characterization and filter design
… modeling and first measurements of a new piezoelectric MEMS resonator developed at Draper Laboratory. In addition, some simple filter designs incorporating the resonator with predicted performance parameters were analyzed, with a special focus on the suitability of using the Draper …
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Piezoelectric MEMS for Energy Conversion in Biomedical Devices
… this context, micro-electromechanical systems (MEMS) has emerged as a promising technology, attracting significant attention for their potential in various industries and applications under stringent operational requirements. This thesis explores MEMS technology, focusing on innovative methods …
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Optimization and design of radio frequency piezoelectric MEMS resonators
… frequency (RF) microelectromechanical system (MEMS) resonators employing Lamb waves propagating in piezoelectric thin films have recently attracted much attention since they combine the advantages of the bulk acoustic wave (BAW) and surface acoustic wave (SAW) technologies: high phase velocity …
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Advancing acoustic filters for 5G front-ends: Lithium niobate piezoelectric MEMS resonators and filters
… received much research attention for 5G are the piezoelectric acoustic or MEMS resonators, filters, and multiplexers, as they remain essential for accessing the crowded RF spectrum with low loss, high interference rejection, and small form factors. This dissertation reports on the design, …
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Design of test bench apparatus for piezoelectric energy harvesters
… test bench for the characterization of piezoelectric microelectromechanical system (MEMS) energy harvester being developed by the Micro & Nano Systems Laboratory research group at MIT. Piezoelectric MEMS energy harvesters are micro-devices that are able to harvest energy from their …
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The design of low-frequency, low-g piezoelectric micro energy harvesters
A low-frequency, low-g piezoelectric MEMS energy harvester has been designed. Theoretically, this new generation energy harvester will generate electric power from ambient vibrations in the frequency range of 200~30OHz at excitation amplitude of 0.5g. Our previous energy harvester successfully …
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Performance optimization of lateral-mode thin-film piezoelectric-on-substrate resonant systems
… and improve the performance of thin-film piezoelectric-on-substrate (TPoS) lateral-mode resonators and filters. TPoS is a class of piezoelectric MEMS devices which benefits from the high coupling coefficient of the piezoelectric transduction mechanism while taking advantage of superior …
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Low-frequency, low-amplitude MEMS vibration energy harvesting
… available vibration source. Typical resonating MEMS structures cannot be used with low-frequency, low-amplitude and unpredictable nature of ambient vibrations. Bi-stable nonlinear oscillator based energy harvesters are developed for lowering the operating frequency while widening the bandwidth, …
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Super-high-frequency lithium niobate microelectromechanical system resonators
… new class of SHF microelectromechanical system (MEMS) resonators operating in the 5 GHz range. The SHF resonances have been achieved by employing the first order antisymmetric (A1) mode in ion-sliced and suspended Z-cut lithium niobate (LiNbO3) thin films, which feature a phase velocity exceeding …
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Ink jet printing of PZT thin films for MEMS
Of the readily available piezoelectric engineering materials perovskite phase lead zirconate titanate (PZT) has the strongest mechanical to electrical coupling. PZT based devices have the potential to have the highest performance. Due to the strong piezoelectric response and low operating voltage, …
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Materials selection for microsystems actuators
… philosophy of Micro-Electro- Mechanical Systems (MEMS) from process centric to performance centric. This presents an opportunity to improve the performance of MEMS devices by materials selection beyond the commonly preferred candidates compatible with the Complimentary-Metal-Oxide-Semiconductor …
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Thermally modulated solidly mounted resonators for applications in biosensing
… and robustness. These resonators employ piezoelectric films in the thickness range of 0.6 µm- 2 µm, enabling them to operate at high frequencies between 0.8-4 GHz. However, at such high frequencies, the environmental and boundary conditions affect these acoustic resonators more compared …