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Showing 1 to 6 of 6 for “"physical sputtering"”.
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Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas
… process it is necessary to have an appropriate physical model to describe the surface kinetics including simultaneous etching and deposition. A novel surface kinetic model, the translating mixed-layer (TML) model, has been developed. ABACUSS II, a modeling environment and simulator was used for …
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3-dimensional modeling and simulation of surface and sidewall roughening during plasma etching
… used to explore surface roughening during the physical sputtering of a blanket silicon surface by argon ion bombardment. The results showed that there is a significant change in its morphology with different off-normal angles of incidence. When the surface is etched at normal incidence, the …
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Study of molybdenum sources and screening in the Alcator C-Mod tokamak
… is crucial if one wants to minimize it. A simple physical sputtering model has been developed that calculates the molybdenum source at the divertor, providing satisfactory agreement with the spectroscopic results. The effect of deuterons, boron ions, and redeposited molybdenum incident on the …
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Atomistic Simulation Of Plasma Interaction With Plasma Facing Components In Fusion Reactors
… particles to investigate retention, deposition, sputtering, erosion, blistering effects, diffusion, and so on.</p> <p>The deuterium bombardment of monocrystalline tungsten was modeled by LAMMPS code using Tersoff type interatomic potential. The deuterium trapping rate, implantation depth, and …
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Feature profile evolution during the high density plasma etching of polysilicon
… permitted the incorporation of all dominant physical and chemical mechanisms of the etching process such as angle-dependent ionenhanced etching, physical sputtering, ion scattering, surface recombination, plasma deposition, and line-of-sight re-deposition without encountering numerical …
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Tritium Inventory in the Neutral Beam Box of TFTR
Made available in DSpace on 2017-07-06T18:48:59Z (GMT). No. of bitstreams: 3 Kelly_James_P_MS.pdf: 46135971 bytes, checksum: 486626d2ffde3d72952df736e73dfad1 (MD5) Kelly_James_P_MS_ABS.pdf: 600494 bytes, checksum: 496ef90024c559288dcf8f2a5af7f20b (MD5) license.txt: 4813 bytes, checksum: …