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Showing 1 to 1 of 1 for “"photoresist slab"”.
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Theory, Design, and Fabrication of Diffractive Grating Coupler for Slab Waveguide
… recording the interference between two waves in photoresist. The waveguide is fabricated from silicon nitride that is deposited by chemical vapor deposition. The diffraction grating recording assembly is described along with the grating coupler fabrication process. A grating coupler is fabricated …