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Showing 1 to 5 of 5 for “"photochemical etching"”.

  1. Digital projection photochemical etching for gray-scale semiconductor applications

    … This thesis presents digital projection photochemical etching, a novel and dynamic semiconductor fabrication technique that achieves a 3-dimensional structure in a single etch step. This technique utilizes a commercial digital projector to focus a substantially de-magnified image beam …

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  2. Characterization of the photochemical etching process: an alternative microfluidic device fabrication method

    A newly developed process known as photochemical etching (PC etching), which combines optical imaging and wet chemical etching, can be utilized as an alternative to fabricate the master mold of a microfluidic device. During this process, a semiconductor substrate is submerged in an etchant …

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  3. Development of photochemical etching and its application in fabrication of integrated reflector metal semiconductor metal photodetectors

    "Photolithography and etching form the basis of any microfabrication process. Consequently, there is a lot of interest in the research community to improve and innovate on these crucial steps so as to realize the fabrication of complex devices. Once limited to use as physical photomasks for …

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  4. Diffraction phase microscopy for applications in materials science

    … Our DPM system has been used to monitor wet etching, photochemical etching, dissolution of biodegradable electronic materials, expansion and deformation of thin-films and microstructures, and surface wetting and evaporation. It has also been used in semiconductor wafer defect detection. …

    uiuc Repository record for Diffraction phase microscopy for applications in materials science (opens in a new tab)

  5. Metal-assisted chemical etching of 4H silicon carbide

    Metal-assisted chemical etching (MacEtch) is a wet etching method that can produce high aspect ratio nanostructures with minimal crystal damage. The MacEtch process has been demonstrated to overcome limitations of dry and wet etching in several materials, studied extensively since its discovery by …

    uiuc Repository record for Metal-assisted chemical etching of 4H silicon carbide (opens in a new tab)