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Showing 1 to 1 of 1 for “"phase grating mask"”.
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A New Hybrid Diffractive Photo-mask Technology
… for micro-chip manufacturing, the photo-mask is used to print desired patterns on a proper photo-resist on wafer. The most common type of photo-mask is binary amplitude mask made an opaque layer of chrome. The principle and potential application of hybrid photo-mask with diffractive phase …