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Showing 1 to 1 of 1 for “"parallel kinematic mechanism"”.
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A 2 degree-of-freedom SOI-MEMS translation stage with closed loop positioning
… micro positioning stage is developed by adapting parallel-kinematic mechanisms, which have been widely used for macro and meso scale positioning systems, to silicon-based micropositioner. Two orthogonal electrostatic comb drives are connected to moving table through 4-bar mechanism and independent …